Depends on how far down the rabbit hole you're going. For starters, here's the list of Linux test utilities, which do basic benchmarking for the Linux file systems.
http://ltp.sourceforge.net/tooltable.php
If you're doing serious performance evaluation, I'd suggest something like filebench, or iozone, both of which are very flexible tools for benchmarking. They'll work for either local or network file systems, but they simply write files to a mounted file system, they don't exercise the NFS or CIFS driver directly.
Also check out the file system benchmarking portal (original link broken as of 2017, archived version available), which has a nice long list of available testing tools, as well as their applications. It's also got a bunch of information on how to correctly set up benchmarks to correct for things like cache effects, so that your numbers reflect the true performance.
You can enable diagnostic mode in iozone to check for corruptions, and I believe filebench has something similar. Or just checksum your data and validate it at the end, but that's slightly less out of the box.